| 摘要 |
PROBLEM TO BE SOLVED: To provide a resin composition for coating imparting a coating excellent in uniformity of thin film formed by a spin-coating, slit & spin-coating, a slit-coating, etc. SOLUTION: The invention relates to the resin composition for coating comprising a fluorinated surfactant which comprises a vinyl polymer containing fluorinated alkyl group comprising a fluorinated alkyl group (a1) and an aromatic ring (a2) and an acidic group (a3), and a binder resin comprising an aromatic ring (b1) and an acidic group (b2). COPYRIGHT: (C)2006,JPO&NCIPI
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