摘要 |
PROBLEM TO BE SOLVED: To provide a photoionization mass spectrometry apparatus for high boiling point substances in order to obtain accurate and reproducible ion yield curves automatically in a short period of time. SOLUTION: The apparatus comprises a sample furnace 1, a mass spectrometer, a film thickness gage 6, and a photodiode detector. A sample is heated and led to an ionization chamber as a neutral gas to measure time-of-flight mass spectra by means of a pulse push-out method with 10kHz pulse, and the data are collected and processed by a high-speed multi-channel scaler and a central computer. In this manner, mass spectra are measured with continuously changing photon energy (wavelength), and ion yield curves of any three species of ions are measured as well. During the measurement, concentration of the sample and light flux within an ionization region are constantly monitored to send these values to the computer and normalize the ion yield. COPYRIGHT: (C)2006,JPO&NCIPI
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