| 摘要 |
PROBLEM TO BE SOLVED: To provide a chemical liquid supply device constituted so as to stabilize the discharge amount and flow rate of a chemical liquid. SOLUTION: A primary valve 13 and a secondary valve 14 are attached to a nozzle assembly 12 having a jet orifice 11 for discharging the chemical liquid formed thereto. The primary valve 13 is a valve for opening and closing a secondary flow channel 14b having communication with the jet orifice 11, while the secondary valve 14 is a valve for opening and closing a primary flow channel 13b communicating with a connection port 18 opened to the outside and a pump is provided between the primary valve 13 and the secondary valve 14. A double pipe 21 constituted of an inner pipe 19, through which the chemical liquid flows, and an outer pipe 20 through which temperature conditioning water flows, is connected to the connection port 18 and the chemical liquid held to a constant temperature is sucked into a pump chamber 52 to be discharged from the jet orifice 11. COPYRIGHT: (C)2006,JPO&NCIPI
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