发明名称 |
Raw material solution, ferroelectric film, method for manufacturing ferroelectric film, piezoelectric element, piezoelectric actuator, ink jet recording head, and ink jet printer |
摘要 |
By designing the structure of ferroelectric constituting elements in a raw material solution for a ferroelectric thin film, the crystallization temperature is lowered. A raw material solution forms the ferroelectric shown by a general formula of ABO<SUB>3</SUB>, and includes a sol-gel raw material, and a MOD raw material having a stoichiometric composition of at least an element B that is identical with the sol-gel raw material.
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申请公布号 |
US2005218437(A1) |
申请公布日期 |
2005.10.06 |
申请号 |
US20050089431 |
申请日期 |
2005.03.24 |
申请人 |
UENO MAYUMI;KIJIMA TAKESHI;HAMADA YASUAKI |
发明人 |
UENO MAYUMI;KIJIMA TAKESHI;HAMADA YASUAKI |
分类号 |
B41J2/16;B41J2/045;B41J2/055;C01B13/32;C04B35/00;C04B35/495;C23C18/12;H01L21/314;H01L21/316;H01L21/8246;H01L27/105;H01L29/76;H01L41/08;H01L41/09;H01L41/187;H01L41/22;H01L41/24;H02N2/00;(IPC1-7):H01L29/76 |
主分类号 |
B41J2/16 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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