发明名称 Raw material solution, ferroelectric film, method for manufacturing ferroelectric film, piezoelectric element, piezoelectric actuator, ink jet recording head, and ink jet printer
摘要 By designing the structure of ferroelectric constituting elements in a raw material solution for a ferroelectric thin film, the crystallization temperature is lowered. A raw material solution forms the ferroelectric shown by a general formula of ABO<SUB>3</SUB>, and includes a sol-gel raw material, and a MOD raw material having a stoichiometric composition of at least an element B that is identical with the sol-gel raw material.
申请公布号 US2005218437(A1) 申请公布日期 2005.10.06
申请号 US20050089431 申请日期 2005.03.24
申请人 UENO MAYUMI;KIJIMA TAKESHI;HAMADA YASUAKI 发明人 UENO MAYUMI;KIJIMA TAKESHI;HAMADA YASUAKI
分类号 B41J2/16;B41J2/045;B41J2/055;C01B13/32;C04B35/00;C04B35/495;C23C18/12;H01L21/314;H01L21/316;H01L21/8246;H01L27/105;H01L29/76;H01L41/08;H01L41/09;H01L41/187;H01L41/22;H01L41/24;H02N2/00;(IPC1-7):H01L29/76 主分类号 B41J2/16
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