| 发明名称 |
Integrated circuit with metal layer having carbon nanotubes and methods of making same |
| 摘要 |
A method of fabricating an integrated circuit comprises forming or providing a solution containing carbon nanotubes and forming a metal layer utilizing the solution.
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| 申请公布号 |
US2005218523(A1) |
申请公布日期 |
2005.10.06 |
| 申请号 |
US20040814375 |
申请日期 |
2004.03.30 |
| 申请人 |
DUBIN VALERY M |
发明人 |
DUBIN VALERY M. |
| 分类号 |
H01L21/288;H01L21/768;H01L23/48;H01L23/532;(IPC1-7):H01L23/48 |
主分类号 |
H01L21/288 |
| 代理机构 |
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代理人 |
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| 主权项 |
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| 地址 |
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