| 摘要 |
<p>A processing unit (10) is provided with a processing part (15) so as to easily check inspection result information of a semiconductor chip formed on a semiconductor wafer. The processing part (15) compares quality numbers at the same position, based on two pieces of inspection result information, including position information of the semiconductor chip formed on the semiconductor wafer and the quality number of the semiconductor chip, obtains correlativity of each quality number, generates display data of a wafer map image wherein colors corresponding to the correlativities are displayed in each corresponding area indicated by each position information, and permits a display part (13) to display the wafer map image.</p> |
