| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide an acid-dissociable group-containing polymer which has high transparency to a radiation, and fulfills the basic performance required of a resist, and to provide a radiation-sensitive composition. <P>SOLUTION: The acid-dissociable group-containing polymer has a repeating unit represented by formula (1). The radiation-sensitive resin composition comprises the polymer and a radiation-sensitive acid generator. <P>COPYRIGHT: (C)2006,JPO&NCIPI |
