| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a manufacturing method of a vibration gyro whose vibration includes no outersurface component and which needs no mechanical adjustment. <P>SOLUTION: In the manufacturing method of the vibration gyro used for applying wet etching processing to a Z cut crystal plate, anticorrosion film patterns 31 to 33 are formed while being deviated by a prescribed amount in a prescribed direction so that end positions of the anticorrosion film patterns 31 to 33 formed to a principal surface 21 at a +Z axis side are dissident from end positions of anticorrosion film patterns 34 to 36 formed to a principal surface 22 of a -Z axis. That is, the anticorrosion film patterns 31 to 33 are deviatedly formed by a width d in the -X axis direction so that the end positions of the anticorrosion film patterns 31 to 33 formed to the principal surface 21 at the +Z axis side are dissident from the end positions of anticorrosion film patterns 34 to 36 formed to the principal surface 22 of the -Z axis. The outer shape of the crystal vibrator is determined by the anticorrosion film patterns 31 to 36. <P>COPYRIGHT: (C)2006,JPO&NCIPI |
