摘要 |
PROBLEM TO BE SOLVED: To inexpensively manufacture a high-quality microlens array for use in a high-resolution CCD. SOLUTION: When the CCD 10 is formed, a block 30 is formed by transferring a lens material onto a color filter array 22 in accordance with an arrangement pattern of the microlenses by a photolithographic method. A recess 36 corresponding to a shape of the microlens is arranged in a stamper 34 in a pattern corresponding to the arrangement pattern of the microlenses, and working is performed by embossing the block in the decompressed environment by using the stamper, so that the microlens can be formed. In this case, the microlens array can be formed with a high degree of accuracy, because the block gets into the recess in the decompressed environment so that air in the recess can be discharged. COPYRIGHT: (C)2006,JPO&NCIPI |