ACTUATOR AND OPTICAL DEVICE

摘要

PROBLEM TO BE SOLVED: To provide an actuator high in mobile stability by reducing unnecessary static power and easy in mobile control, and an optical device. SOLUTION: The actuator comprises a first comb-shaped electrode having a plurality of first electrode fingers 13, and a second comb-shaped electrode having a plurality of electrode fingers 14a, 14b that are engaged with the plurality of first electrode fingers 13. The width of the first electrode finger 13 at the finger tip 19a of the first electrode finger 13 is wider than the root 20 of the first electrode finger 13. COPYRIGHT: (C)2006,JPO&NCIPI