| 摘要 |
PROBLEM TO BE SOLVED: To provide a failure predicting system enabling maintenance of a monitored object to be performed at the correct timing. SOLUTION: The failure predicting system 1 for monitoring a gas discharger used for discharging gas generated in a manufacturing process such as a semiconductor producing process, comprises an oscillator 14 provided in a casing of the gas discharger and/or gas atmosphere in piping near the gas discharger; an exciting element 13 capable of oscillating the oscillator 14; a oscillation detecting element 15 for detecting oscillation generated by the oscillator 14; and a protecting device 12 controlling an action of the exciting element 13, receiving an output signal of the oscillation detecting element 15, memorizing changes in a structure of the oscillator 14, and detecting that the change exceeds a predetermined threshold to output. COPYRIGHT: (C)2006,JPO&NCIPI
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