发明名称 CIRCUIT DEVICE AND METHOD OF MANUFACTURING THE SAME
摘要 <p><P>PROBLEM TO BE SOLVED: To reduce the electric resistance of an interconnection pattern without causing the increase in manhour for manufacturing, by carrying out the bank raising of the pattern by forming a metal film which is the same as that for underbump metal, also on at least a portion of the interconnection pattern provided on a substrate in the treatment of the underbump metal of a circuit device having a bump for bonding on the surface of the substrate. <P>SOLUTION: The circuit device is constituted by forming an under bump metal on the surface of a substrate 1, and providing a connecting bump 12 on the under bump metal. At least a portion of an interconnection pattern 2 and an electrode pad pattern 4 provided on the surface of the substrate 1 are exposed and a passivation film 3 is formed. When the underbump metal is formed, a metal film is formed in a laminated manner on the exposed portion of the electrode pad pattern 4 and the interconnection pattern 2. <P>COPYRIGHT: (C)2006,JPO&NCIPI</p>
申请公布号 JP2005277106(A) 申请公布日期 2005.10.06
申请号 JP20040088145 申请日期 2004.03.25
申请人 TDK CORP 发明人 DOMON TAKAAKI;NAGATSUKA TOSHIYUKI;YASUI TSUTOMU;KONDO RYOICHI
分类号 H01L21/60;H01L23/485;H01L23/522;(IPC1-7):H01L21/60 主分类号 H01L21/60
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