LIGHT SOURCE UNIT, SEMICONDUCTOR EXPOSURE DEVICE, LASER MEDICAL TREATMENT DEVICE, LASER INTERFEROMETER DEVICE, AND LASER MICROSCOPE DEVICE

摘要

PROBLEM TO BE SOLVED: To provide a light source unit which outputs coherent light of≤200 nm, specially, 193 or 157 nm wavelength replacing an ArF excimer laser or F2laser by using a new wavelength converting element which is a ferroelectric instead of a conventional wavelength converting element.

SOLUTION: In the light source unit which is equipped with at least one laser light source and at least one wavelength converting element and converts the wavelength of light emitted by the laser light source by the wavelength converting element to output coherent light, at least one of wavelength converting elements is a wavelength converting element made of a single crystal strontium aluminum fluoride (SrAlF5) where a partially polarization inverted structure is formed.

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