| 摘要 |
PROBLEM TO BE SOLVED: To provide an optical interconnect and method that provides a structure that corrects for slight misalignments between the components, has minimal optical loss, is insensitive to misalignment and can be easily scaled to device that transmit many optical beams. SOLUTION: The present invention is directed to structures and methods of manufacturing such structures for providing optical connections between spaced-apart, opposing surfaces of substrates having optically active areas that are compatible with semiconductor processing steps. An optical polymer is provided between opposing surfaces of a substrate and component or between two substrates to allow optical signals to pass therebetween and to bond the opposing surfaces. In one embodiment, the waveguide is formed from a photosensitive polymer that is patterned, cured and etched to provide the optical connection. In another embodiment, a photobleachable polymer is cured by light through a connected waveguide to provide a waveguide core. COPYRIGHT: (C)2006,JPO&NCIPI |
