| 摘要 |
PROBLEM TO BE SOLVED: To provide a new three-dimensional structure for a micro device, which has excellent heat transfer performance and conductivity of a meso-scale, and to provide an effective and specific method of manufacturing the same, and a cooling fin for an electronic element or an IC, using the three-dimensional structure. SOLUTION: The method employs an Ni-based alloy single crystal which is separable into aγphase and aγ' phase by spinodal decomposition when a super-saturated solid solution is aged in a two-phase coexisting area. In order to age the Ni-based alloy single crystal in the two-phase coexisting area and to form a modulated structure by inducing concentration fluctuation, theγ'phase which is regular alignment of cubes, generated by its self-organization in the above procedure, is formed by maintaining the single crystal at the same temperature as an aging temperature or maintaining the single crystal at a temperature lower than the aging temperature. Then theγphase discriminated from a square texture of theγ' phase is formed, and by treating the Ni-based alloy single crystal in a chemical etching solution of a suitable composition, only theγ' phase is selectively dissolved and removed, and a skeletal structure of the meso-scale formed by the dissolubleγphase is left. COPYRIGHT: (C)2006,JPO&NCIPI
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