发明名称 |
Near-field scanning optical microscope for laser machining of micro- and nano- structures |
摘要 |
A near-field scanning optical microscope (NSOM) laser micromachining system for laser machining features on surfaces using an ultrafast laser source and a method of laser machining such features. The system includes: the ultrafast laser source to generate pulses of laser light having pulse durations less than 1 ns and a peak wavelength; an NSOM probe having a substantially cylindrical shape; an NSOM mount to controllably hold the NSOM probe and the microstructure workpiece to be machined; an NSOM probe monitor coupled to the NSOM mount for determining the distance between the probe tip of the NSOM probe and the surface; and an NSOM controller coupled to the NSOM probe monitor, and motion stages in the NSOM mount. The NSOM mount includes an XY motion stage and a Z motion stage. These motion stages are couple to either the NSOM probe or the microstructure workpiece, or one motion stage to each.
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申请公布号 |
US2005218315(A1) |
申请公布日期 |
2005.10.06 |
申请号 |
US20040813503 |
申请日期 |
2004.03.30 |
申请人 |
LI MING;CHENG CHEN-HSIUNG |
发明人 |
LI MING;CHENG CHEN-HSIUNG |
分类号 |
G01Q70/02;B23K26/06;(IPC1-7):H01J3/14 |
主分类号 |
G01Q70/02 |
代理机构 |
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