Electrodes for a fluorine gas discharge laser are disclosed which may comprise a crown straddling the centerline axis between the pair of side walls and the pair of end walls, comprising a first material, forming at least a portion of the discharge region of the electrode; the crown in traverse cross section having the shape of the upper half of a canted ellipse rotated in the preionizer direction, such that a tangent to the short centerline axis of the ellipse forms an angle with the horizontal.
申请公布号
WO2005013391(A3)
申请公布日期
2005.10.06
申请号
WO2004US23012
申请日期
2004.07.16
申请人
CYMER, INC.;DYER, TIMOTHY, S.;MORTON, RICHARD;GILLESPIE, WALTER, D.;STEIGER, THOMAS, D.
发明人
DYER, TIMOTHY, S.;MORTON, RICHARD;GILLESPIE, WALTER, D.;STEIGER, THOMAS, D.