发明名称 ANODES FOR FLUORINE GAS DISCHARGE LASERS
摘要 Electrodes for a fluorine gas discharge laser are disclosed which may comprise a crown straddling the centerline axis between the pair of side walls and the pair of end walls, comprising a first material, forming at least a portion of the discharge region of the electrode; the crown in traverse cross section having the shape of the upper half of a canted ellipse rotated in the preionizer direction, such that a tangent to the short centerline axis of the ellipse forms an angle with the horizontal.
申请公布号 WO2005013391(A3) 申请公布日期 2005.10.06
申请号 WO2004US23012 申请日期 2004.07.16
申请人 CYMER, INC.;DYER, TIMOTHY, S.;MORTON, RICHARD;GILLESPIE, WALTER, D.;STEIGER, THOMAS, D. 发明人 DYER, TIMOTHY, S.;MORTON, RICHARD;GILLESPIE, WALTER, D.;STEIGER, THOMAS, D.
分类号 H01M;H01S3/036;H01S3/038;H01S3/097;H01S3/0971;H01S3/22;H01S3/223;H01S3/225 主分类号 H01M
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