| 摘要 |
A carburetor for MOCVD capable of eliminating such a phenomenon that thin-film material is adhered to the peripheral area of the carburetor near an injection port, wherein carrier gas including material solution fed through a gas passage in which a carrier gas and small amount gas oxide supply part (11) is formed is fed to a vaporization part, a foaming prevention and material solution supply part (12) feeds material for preventing the generation of the air bubbles of the carrier gas including the material solution and the material solution to the carrier gas, a solvent vaporization suppressing cooling system (13) suppresses the vaporization of solvent, and a swirl flow preventing gas supply part (14) supplies gas for preventing the occurrence of swirl flow near the gas outlet of the vaporization part. An atomizing part (15) forms the carrier gas containing the material solution jetted from the carburetor (20) in an atomized state, and a high performance vaporization tube (16) for complete vaporization completely vaporizes the carrier gas including the material solution jetted from the carburetor (20). Thus, the carburetor can be used for a long period without causing clogging, and can stably supply the material to a reaction part.
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