发明名称 DEVICE AND METHOD FOR PREPARING MANAGEMENT CHART AND PROGRAM
摘要 <p><P>PROBLEM TO BE SOLVED: To provide a management chart preparation device which can be used for determining whether or not a manufacturing process is put in a stable status from the fluctuation of a quality characteristic value due to a temporal difference, and for determining whether or not the manufacturing process is put in the stable status from the fluctuation of a quality characteristic value due to a spatial location difference. <P>SOLUTION: This management chart preparation device is provided with a first management chart preparing means, a second management chart preparing means, and a third management chart preparing means. The first management chart preparing means prepares the management chart of a mean value based on the temporal fluctuating values of the quality characteristic values of products manufactured in different time in a manufacturing process. The second management chart preparing means prepares the management chart of ranges or standard deviations based on the temporal fluctuating values of the quality characteristic values of products manufactured in different time in the manufacturing process. The third management chart preparing means prepares the management chart of the ranges or standard deviations based on the temporal fluctuating values of the quality characteristic values of products manufactured at the same time in the manufacturing process. <P>COPYRIGHT: (C)2006,JPO&NCIPI</p>
申请公布号 JP2005277067(A) 申请公布日期 2005.10.06
申请号 JP20040087611 申请日期 2004.03.24
申请人 SEIKO EPSON CORP 发明人 YAZAWA SATORU
分类号 G05B19/418;H01L21/02;(IPC1-7):H01L21/02 主分类号 G05B19/418
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