ALUMINUM OXIDE TITANIUM NITRIDE-BASED SINTERED COMPACT, SUBSTRATE FOR MAGNETIC HEAD USING THE SAME, ULTRASONIC MOTOR, DYNAMIC PRESSURE BEARING, AND METHOD FOR MANUFACTURING THE SAME

摘要

PROBLEM TO BE SOLVED: To provide a sintered compact which is excellent in electrostatic failure resistance and little in variation in volume resistivity.

SOLUTION: The sintered compact is composed of 65 to 85 mass% aluminum oxide and the balance titanium nitride as principal components, wherein the average totalizing the crystal grain size of both of the crystal grains composed of the aluminum oxide and the crystal grains composed of the titanium nitride is 0.4 to 2.0 μm, the average crystal grain size of the aluminum oxide is 0.5 to 2.2 μm and the average crystal grain size of the titanium nitride is 0.2 to 1.6 μm.

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