| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To provide a management device and a management method capable of solving a problem that the judgement of a worker at a job site is needed in performing lot processing, as a maintenance time can not be correctly grasped in a case of semiconductor manufacturing equipment capable of reserving the processing and continuously processing a plurality of lots, and in a case of a deposition system forming films of various thicknesses on the basis of processing conditions. <P>SOLUTION: This management device comprises a first collecting means 104 for collecting the lot information in progress in the semiconductor manufacturing equipment, a second collecting means 103 for collecting the information on a standard value of a recipe and the like, a means for calculating the data necessary for managing the maintenance time of the semiconductor manufacturing equipment on the basis of results collected by the first collecting means 104 and the second collecting means 103, a means 101 for judging the maintenance time from the data including the reservation of processing, and a means 107 for outputting the result. As a result, the maintenance time of the semiconductor manufacturing equipment can be automatically detected, and the availability of processing can be automatically judged at a time of the reservation of processing. <P>COPYRIGHT: (C)2006,JPO&NCIPI</p> |
