WAVEGUIDE TYPE LIGHT SOURCE

摘要

PROBLEM TO BE SOLVED: To introduce a light source having a wider band width to an ATR type sensor constituted of a silicon light waveguide. SOLUTION: An embedded oxide layer 112 serving as a lower clad is provided on a substrate part 111, and a silicon thin line core 105 and an upper clad layer 106 formed so as to embed the silicon thin line core 105 are formed on an emission region on the embedded oxide layer 112, and thereby the light waveguide is constituted. Erbium which is a rare earth element and oxygen atoms are added to the silicon thin line core 105 in the emission region. COPYRIGHT: (C)2006,JPO&NCIPI