SILICON SEED CRYSTAL, ITS MANUFACTURING METHOD, AND METHOD FOR MANUFACTURING SILICON SINGLE CRYSTAL USING SILICON SEED CRYSTAL

摘要

PROBLEM TO BE SOLVED: To provide a silicon seed crystal which enables pulling of a silicon single crystal in an enhanced non-dislocation success rate without performing seed squeezing. SOLUTION: The silicon seed crystal is used for growing the silicon single crystal by a CZ method. In the silicon seed crystal, dislocation is formed at the tip end part being brought into contact with a silicon melt, and oxygen atoms are fixed in the dislocation. COPYRIGHT: (C)2006,JPO&NCIPI