发明名称 |
Job queue management system and method thereof |
摘要 |
A system and method for job queue management. A job queue management apparatus acquires multiple wafer lot records individually regarding a plurality of wafers processed by a recipe, clusters the wafer lots by the common recipe into a group, creates a process job corresponding to the group, and stores the process job in a job queue of a fabrication tool.
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申请公布号 |
US2005221596(A1) |
申请公布日期 |
2005.10.06 |
申请号 |
US20040818916 |
申请日期 |
2004.04.06 |
申请人 |
YOU JAMES;JANG SHEN-JR;SUN KING-CHUAN |
发明人 |
YOU JAMES;JANG SHEN-JR;SUN KING-CHUAN |
分类号 |
H04N1/32;(IPC1-7):H04N1/32 |
主分类号 |
H04N1/32 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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