发明名称 Fabrication method for an in-stack stabilized synthetic stitched CPP GMR head
摘要 A method for fabricating a stitched CPP synthetic spin-valve sensor with in-stack stabilization of its free layer. The method can also be applied to the formation of a stitched tunneling magnetoresistive sensor. The free layer is strongly stabilized by magnetostatic coupling through the use of a longitudinal biasing formation that includes a ferromagnetic layer, denoted LBL, within the pillar portion of the sensor and a synthetic exchange coupled tri-layer within the stitched portion of the sensor. The tri-layer consists of two ferromagnetic layers, FM 1 and FM 2 separated by a coupling layer and magnetized longitudinally in antiparallel directions. A criterion for the magnetic thicknesses of the layers: [t(LBL)+t(FM 1 )]/t(FM 2 )=70/90 angstroms of CoFe insures a strong exchange coupling. The magnetization of the tri-layer is done in a low field anneal that does not disturb the previous magnetization of the ferromagnetic free layer.
申请公布号 US2005219773(A1) 申请公布日期 2005.10.06
申请号 US20040812695 申请日期 2004.03.30
申请人 HEADWAY TECHNOLOGIES, INC. 发明人 LI MIN;ZHENG YOUFENG;ZHANG KUNLIANG;LIAO SIMON;JU KOCHAN
分类号 G01R33/09;G11B5/127;G11B5/33;G11B5/39;H01F10/16;H01F10/32;H01F41/30;H01L43/08;H01L43/12;(IPC1-7):G11B5/33 主分类号 G01R33/09
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