| 摘要 |
PROBLEM TO BE SOLVED: To position a TFT substrate on which alignment marks are set on optional positions as to a TFT substrate inspection apparatus and the alignment of the TFT substrate. SOLUTION: Image pickup means for detecting alignment marks are arranged at optional positions, the TFT substrate is moved, by a stage, for the image pickup means installed on the fixed positions and the image pickup means can photograph the alignment marks by the stage movement. Even when the alignment marks on the TFT substrate are set on optional positions, the positional deviation of the TFT substrate is detected to position the TFT substrate. Since a prober frame is moved, by the stage, for the image pickup means installed on the fixed positions, the alignment marks on the prober frame can be photographed and the positional deviation of the prober frame is detected to position the TFT substrate. COPYRIGHT: (C)2006,JPO&NCIPI |
