| 摘要 |
PROBLEM TO BE SOLVED: To reduce frequency dispersion caused by dispersion in the size of projections in a cross sectional view of legs of the crystal resonator. SOLUTION: The method of manufacturing the crystal resonator comprises the steps of: measuring a size of a metallic film on which a pattern of an external shape of the crystal resonator is formed before applying etching to a crystal wafer: obtaining an etching time by assigning the measured size of the metallic film to a numerical expression for combining the etching time of the crystal wafer, the measured size of the metallic film, and a prescribed frequency with each other; and applying etching to the crystal wafer by using the time for etching the crystal wafer as the obtained etching time. COPYRIGHT: (C)2006,JPO&NCIPI
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