| 摘要 |
PROBLEM TO BE SOLVED: To improve maintenance workability of an opening/closing device, reduce burden of an operator, shorten a working time, and improve working efficiency, in a substrate processing apparatus. SOLUTION: In the substrate processing apparatus wherein a substrate is shipped in/out by a substrate housing container with an enclosed structure; an enclosure 20 is divided into a container transfer space 2 and a substrate transfer space by a partition 1, a container receiving part 32 is provided in the container transfer space and a container cover opening/closing part is provided in the substrate transfer space, and then the container receiving part and the container cover opening/closing part are integrally rotatable. COPYRIGHT: (C)2006,JPO&NCIPI
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