Optical component of quartz glass, method for producing the optical component, and use thereof

摘要

Starting from an optical component of quartz glass for transmitting ultraviolet radiation of a wavelength between 190 nm and 250 nm, with a glass structure essentially without oxygen defects, a hydrogen content ranging from 0.1x10¹⁶ molecules/cm³ to 5.0x10¹⁶ molecules/cm³, and with a content of SiH groups of less than 5x10¹⁶ molecules/cm³, to provide such a component which is particularly well suited for use with linearly polarized UV laser radiation, the present invention suggests that the component should have a content of hydroxyl groups ranging from 10 to 250 wt ppm and a fictive temperature above 1000° C.