METHOD AND PRECISE LASER NANOMACHINING WITH UV ULTRAFAST LASER PULSES

摘要

A method for manufacturing a microstructure, which includes at least one feature having a dimension less than 200nm, on a work piece. Pulses of UV laser light having a duration of less than about fps and a peak wavelength of less than about 380nm are generated. These pulses ofUV laser light are focused to a substantially diffraction limited beam spot (306) within a target area of the work piece (124). The fluence of this substantially diffraction limited beam spot (306) in the target area of the work piece (124) is controlled such that the diameter of the section of the target area (304) machined by one of the pulses of UV laser light is less than 200nm.