Electronic circuit for use in a spatial light modulator and method of performing photolithography using the same

摘要

An electronic circuit that can be used, for example, in a spatial light modulator (110) to photolithographically transfer an image onto a substrate (150), includes a strobe buffer (1260) connected between a strobe line (800) and at least two associated circuit elements (310) to buffer the strobe signal (602) on the strobe line (800) and provide a buffered strobe signal to the associated circuit elements (310). The strobe line (800) is electrically coupled to a set of the circuit elements (310) to provide a strobe signal (602) thereto. The strobe signal (602) causes the circuit elements (310) in the set to shift data (222) to additional circuit elements (310) outside of the set. The circuit elements (310) are alterable in response to data (222) stored therein.