Nanometric mechanical oscillator, method of fabricating the same, and measurement apparatus using the same

摘要

A measurement apparatus using a nanometric mechanical oscillator comprising:
(a) a base;
(b) an oscillator mass; and
(c) an elastic neck portion for connecting the base and the oscillator mass:
€ƒ€ƒ€ƒcharacterized in that the elastic neck portion is a micro thin wire shape whereby physical characteristics of a sample are measured by oscillation of the oscillator mass caused by the sample.