发明名称 Wavelength detector
摘要 <p>A radiation measurement device for determining a wavelength-related characteristic of radiation from a radiation source is provided. The device includes a wavelength-dependent optical element (e.g., bandpass filter), and an optical power-measuring detector (e.g., photodetector). At least one optical beam is incident onto a polarization-sensitive reflective and/or transmissive surface positioned along an optical path of the device, is transmitted by the wavelength-dependent optical element, and is received by the optical power-measuring detector along the optical path. The radiation measurement device further includes a linear polarizer placed along the optical path prior to the optical power-measuring detector. In operation, the linear polarizer ensures that the beam received from the polarization-sensitive reflective and/or transmissive surface has a substantially fixed state of polarization, regardless of the polarization state of the original incident optical beam, to thereby reduce or eliminate uncontrolled polarization-dependent errors in the radiation measurement device.</p>
申请公布号 EP1582851(A2) 申请公布日期 2005.10.05
申请号 EP20050006408 申请日期 2005.03.23
申请人 MITUTOYO CORPORATION 发明人 FELDMAN, MARK
分类号 G01J3/28;G01J9/00;(IPC1-7):G01J9/00 主分类号 G01J3/28
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