发明名称 Thin-film field-effect transistors and making method
摘要 In a thin-film field-effect transistor having a MIS structure, the insulator layer is formed of cyanoethylated dihydroxypropyl pullulan. The TFT is prepared by applying a cyanoethylated dihydroxypropyl pullulan solution onto a gate electrode in the form of a metal layer, drying the applied solution to form an insulator layer, and thereafter, forming a semiconductor layer thereon.
申请公布号 EP1583165(A1) 申请公布日期 2005.10.05
申请号 EP20050252001 申请日期 2005.03.30
申请人 SHIN-ETSU CHEMICAL CO., LTD. 发明人 FUKUI, IKUO
分类号 H01L21/28;H01L29/49;H01L51/05 主分类号 H01L21/28
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