METHOD OF PRODUCING SOI WAFER AND SOI WAFER,申请号EP20030768276-传众专利搜索

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发明名称	METHOD OF PRODUCING SOI WAFER AND SOI WAFER
摘要
申请公布号	EP1583145(A1)	申请公布日期	2005.10.05
申请号	EP20030768276	申请日期	2003.12.25
申请人	SHIN-ETSU HANDOTAI CO., LTD	发明人	AGA, HIROJI;YOKOKAWA, ISAO;TAKANO, KIYOTAKA;MITANI, KIYOSHI
分类号	H01L21/02;H01L21/762;H01L27/12;(IPC1-7):H01L21/76	主分类号	H01L21/02
代理机构		代理人
主权项
地址

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