Method and device for producing globular grains of high-puroty silicon having a diameter of between 50 mum and 300 mum and use of the same

摘要

The invention relates to a method and a device for producing globular grains of high-purity silicon by atomising a silicon melt ( 6 ) in an ultrasonic field ( 10 ). Globular grains having a grain size of 50 mum can be produced by means of said method and device and can be used to separate high-purity silicon from silane in the fluid bed. The silicon melt ( 6 ) is fed into the ultrasonic field ( 10 ) at a distance of <50 mm in relation to a field node, and the atomised silicon leaves the ultrasonic field ( 10 ) at a temperature close to the liquidus point. The invention also relates to a use of the product produced according to the inventive method or using the inventive device, as particles for producing high-purity silicon from silane in a fluid bed.