发明名称 Workpiece-surface processing head
摘要 A workpiece-surface processing head has at least one processing tool which comes into contact with the surface to be processed and whose longitudinal axis is oriented essentially perpendicularly to the surface to be processed. The processing tool, for processing the workpieces, can be traversed by means of at least one drive device in a direction (X; Y) running at least approximately perpendicularly to its longitudinal axis.
申请公布号 US6951500(B2) 申请公布日期 2005.10.04
申请号 US20030418635 申请日期 2003.04.18
申请人 CARL ZEISS SMT AG 发明人 STACKLIES SIEGFRIED
分类号 B24B7/24;B24B27/04;B24B41/04;(IPC1-7):B24B1/00 主分类号 B24B7/24
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