发明名称 |
Method of drilling holes with precision laser micromachining |
摘要 |
The invention is an apparatus and a method for drilling holes in a work piece with a laser. A laser beam is received by the optical system and directed along an optical path. The system directs the laser beam through a moveable mask aperture creating a sub-beam, that is reduced in size by a lens system as it is imaged onto a work piece. Multiple features are formed in the work piece by moving the mask. |
申请公布号 |
US6951627(B2) |
申请公布日期 |
2005.10.04 |
申请号 |
US20020329036 |
申请日期 |
2002.12.24 |
申请人 |
MATSUSHITA ELECTRIC INDUSTRIAL CO., LTD. |
发明人 |
LI MING;ISHIZUKA MAKOTO;LIU XINBING |
分类号 |
B23K26/00;B23K26/04;B23K26/06;B23K26/38;(IPC1-7):B23K26/03 |
主分类号 |
B23K26/00 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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