曝光装置及元件制造方法,申请号TW094104736-传众专利搜索

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发明名称	曝光装置及元件制造方法
摘要	曝光装置(EX)，系具有：透过光学系统(30)与液体(L)将曝光用光(EL)照射于基板(W)之曝光区域(E)；及在曝光前用以取得该基板(W)相关位置的资讯之量测区域(A)；使基板(W)移动于曝光区域(E)与量测区域(A)之间，以进行基板(W)的曝光；其具备侵入阻绝机构(60)，供防止曝光区域(E)周边的气体(G)侵入量测区域(A)。
申请公布号	TW200532393	申请公布日期	2005.10.01
申请号	TW094104736	申请日期	2005.02.18
申请人	尼康股份有限公司	发明人	高岩宏明
分类号	G03F7/20;H01L21/027	主分类号	G03F7/20
代理机构		代理人	林镒珠
主权项
地址	日本

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