发明名称 PROCEDE DE FABRICATION DE FILM CONDUCTEUR ANISOTROPE A INSERTS CONDUCTEURS POINTUS
摘要 The invention relates to a method for making an anisotropic conductive film with pointed conductive inserts. The method comprises the etching of at least one pattern (C 1 , K 1 ) in a single crystal substrate ( 15 ) in order to form at least one cell ( 22, 26 ) with a bottom intended for drawing the contour of an end of an insert ( 23, 27 ). The drawing of the pattern is for having at least one protruding tip appear in the bottom of the cell during the etching of the pattern along the ( 100 ) crystallographic plane of the substrate with limiting ( 111 ) or ( 110 ) planes of the pattern. The invention is applied to microconnector technology.
申请公布号 FR2842023(B1) 申请公布日期 2005.09.30
申请号 FR20020008451 申请日期 2002.07.05
申请人 COMMISSARIAT A L'ENERGIE ATOMIQUE 发明人 BALERAS FRANCOIS;RENARD PIERRE;ROSSAT CYRILLE
分类号 H01L21/48;H01L21/60 主分类号 H01L21/48
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