| 摘要 |
PROBLEM TO BE SOLVED: To provide a burn-in device which can securely adjust the temperatures of many electronic parts having different self-exothermal values to predetermined temperatures at the same time. SOLUTION: The burn-in device conducts the burn-in test on a plurality of DUTs while bringing a heater block 420a having a heater 421a, a cooling block 410a in whihc flow passages 411a to 413a through which a refrigerant can flow are formed therein and a sensor block 430a having a temperature sensor 431a into contact with the plurality of DUTs mounted on a burn-in board 200. A first accommodating space 415a and a second accommodating space 416a are formed in the cooling block 410a, and the heater block 420a is accommodated in the first accommodating space 415a in the state where the heater block 420a keeps a distance from an inner wall surface. The sensor block 430a is accommodated in the second accommodating space 416a in the state where the sensor block 430a keeps a distance from the inner wall surface. COPYRIGHT: (C)2005,JPO&NCIPI
|
