发明名称 METHOD OF INSPECTING SEMICONDUCTOR INTEGRATED CIRCUIT
摘要 PROBLEM TO BE SOLVED: To accurately inspect the uniformity of gradation voltages from DA converters. SOLUTION: Voltage having the same level are applied to both the ends of ladder resistors R1 to R6. Thus, the resistance values of the ladder resistors R1 to R6 are neglected, and voltage values of a plurality of gradation voltages to be generated by a first voltage supply circuit 98a become identical. Therefore, the uniformity of the gradation voltages outputted from each of the DA converters can be judged. Further, the resistance values of the ladder resistors R1 to R6 are neglected, so that no influence occurs such as contact resistance when voltage is applied to both the ends of the ladder resistors R1 to R6, thereby enabling stable inspection. COPYRIGHT: (C)2005,JPO&NCIPI
申请公布号 JP2005265636(A) 申请公布日期 2005.09.29
申请号 JP20040079149 申请日期 2004.03.18
申请人 SHARP CORP 发明人 MORI MASAMI;SAKAGUCHI HIDEAKI
分类号 G01R31/316;(IPC1-7):G01R31/316 主分类号 G01R31/316
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