Loading and unloading apparatus for a coating device

摘要

The invention relates to a device for loading at least one substrate ( 1 ) into a process chamber of a coating unit and unloading the at least one substrate ( 1 ) therefrom by means of a gripper ( 2 ) of a handling machine. The inventive device comprises a loading plate ( 3 ) which can be gripped by the gripper ( 2 ) and embodies a storage place for each at least one substrate ( 1 ), said storage place being formed by an edge ( 4 ) of an opening ( 5 ) that is assigned to each substrate ( 1 ). The inventive device also comprises a substrate holder ( 7 ) that is provided with a pedestal-type substrate support which is adapted to the loading plate ( 3 ) and on which the substrate plate can be placed such that some sectors of the surface of the substrate support are located at a certain gap distance from the substrate or the substrate lies in a planar manner on a sector of the surface.