| 摘要 |
A method for making piezoelectric cantilever pressure sensor array is disclosed. The method contains forming a layer structure comprising a substrate, an elastic layer, a first electrode layer, a piezoelectric layer, and a second electrode layer, defining piezoelectric cantilevers in the layer structure, defining Y-lines in the first electrode layer, forming X-lines; and creating a cavity under each piezoelectric cantilever. The piezoelectric cantilever pressure sensor array can be used in various applications including fingerprint identification devices.
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