| 摘要 |
PROBLEM TO BE SOLVED: To provide a casing for optical components that effectively cools components arranged at a rear stage without being overheated. SOLUTION: The casing 10 for the optical components sets the illumination optical axis of beam emitted by a light source 411, and receives a plurality of optical components to arrange each optical component in a predetermined position on the illumination optical axis. The casing 10 includes an integrator illumination optical system where the plurality of optical components split the beam emitted from the light source into a plurality of partial beams to be superposed at an area to be illuminated. The casing 10 constitutes the integrator illumination optical system, and comprises: a first casing part 20, which is arranged at the light source side more than a boundary formed by the insertion point of the superposed lens arranged at the last stage on the illumination optical axis, and constituted by heat insulating materials for receiving the optical components constituting the integrator illumination optical system; and a second casing part 30 made of metal, which is arranged at the rear stage side of beams more than the boundary, and receives other optical components. COPYRIGHT: (C)2005,JPO&NCIPI
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