发明名称 |
Method of processing a workpiece |
摘要 |
This invention relates to a method of processing a workpiece in a chamber. Initially a surface of the workpiece is treated by a process which includes supplying a reactive gas to the chamber through a first gas supply and the surface is then further treated using a process gas supplied to the chamber through a second gas supply during the supply of the process gas so that a portion of the process gas flows into the first gas supply from the chamber to mitigate against residual reactive gas entering the chamber during the further treatment step.
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申请公布号 |
US2005211666(A1) |
申请公布日期 |
2005.09.29 |
申请号 |
US20050088261 |
申请日期 |
2005.03.24 |
申请人 |
BURGESS STEPHEN R;PRICE ANDREW |
发明人 |
BURGESS STEPHEN R.;PRICE ANDREW |
分类号 |
C23C16/34;C23C16/44;C23C16/56;C23F1/00;H01L21/768;(IPC1-7):C23F1/00 |
主分类号 |
C23C16/34 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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