| 摘要 |
<p>A unit for introducing microwave (coaxial waveguide) and a microwave launcher for generating volume wave plasma are disposed on one side in a vacuum container, and a movable metal plate is disposed opposite to the microwave launcher on the other side in the vacuum container. The microwave launcher has a construction in which a quartz plate is sandwiched by punching plates having many drilled holes with a specified diameter disposed therein. Microwave is introduced from an external microwave generator to the microwave launcher in, for example, oxygen gas, or a mixture of helium gas and oxygen gas, or a mixture of argon gas and oxygen gas, a mixture of oxygen gas and nitrogen gas, etc. to change a field intensity distribution, whereby volume wave plasma discharge is diffused to the entire inner space in the vacuum container by a microwave leaking through the holes in the punching plates. Consequently, sterilizing method and device are realized that use microwave discharge plasma enabling sterilization inside an air-permeable resin container such as a medical apparatus in a vacuum container.</p> |
