| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a mini-environment system wherein an aligning measuring device is connected with an FOUP port. <P>SOLUTION: In the mini-environment system, an aligning measuring device 100 is provided with: an image processing system 5000 wherein an image that is formed on an imaging device 3000 and includes a mark for aligning measurement prepared on a wafer 10000 is picked up, and an image of the mark for aligning measurement among the obtained images is used to calculate an aligning displacement on the wafer 10000; and a vibration isolator 4000 to reduce an influence of vibration from the outside on a lighting optical system, a detection optical system, an imaging means, a wafer chuck, and a measuring unit 35000 comprised of an X stage 2500 and a Y stage 1500. The aligning measuring device 100 is connected with an FOUP port, so that the wafer 10000 is loaded/unloaded to/from the aligning measuring device 100 through the FOUP port. <P>COPYRIGHT: (C)2005,JPO&NCIPI |
