| 摘要 |
PROBLEM TO BE SOLVED: To place an ion beam separation system linearly in parallel with the orbit of a beam in order to resolve factors causing the upsizing and higher costs of a system due to the larger installation area of a device because the ion separation system uses an analyzing electromagnet of 90°deflection in this system where a conventional ion beam accelerator obtains desired ion beams from polyvalent ion beams emitted from an ion source by an analyzing electromagnet of 90°deflection and a slit placed at stages later than the ion source and accelerates them in an accelerator. SOLUTION: In the ion beam separation system, the ion source, an ion beam convergence means and the slit are linearly placed on the central orbit of the ion beam. COPYRIGHT: (C)2005,JPO&NCIPI
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