摘要 |
Bi<SUB>12</SUB>MO<SUB>20 </SUB>material particles with a diameter of 0.1 to 2 mum, which are filled in an aerosolization chamber, are shaken/agitated together with carrier gas in a high-pressure gas cylinder which stores the carrier gas, thereby being aerosolized. The aerosolized Bi<SUB>12</SUB>MO<SUB>20 </SUB>material particles are injected together with the carrier gas onto a substrate from a nozzle in a film-forming chamber, the nozzle including a narrow opening, and the Bi<SUB>12</SUB>MO<SUB>20 </SUB>material particles are deposited onto the substrate, thereby being formed into a film.
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